BASF plans to start a new production plant for chemical mechanical planarisation products at its KuanYin site in Taoyuan, Taiwan, to serve the semiconductor industry.
The plant will produce BASF's proprietary chemical mechanical planarisation slurries and start to produce chemical mechanical planarisation barrier slurry (PLANAPUR T-Series) and STI slurry (PLANAPUR S-Series) for semiconductor manufacturing.
The new plant will replace the company's existing chemical mechanical planarisation slurry production plant in Longtan.
BASF's chemical mechanical planarisation slurry uses the company's innovative technologies and expertise in polymer science, surface and material chemistries.
